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| Line 75: |
Line 75: |
| ## The process pressure | | ## The process pressure |
| # Etch product: | | # Etch product: |
|
| |
| =Table with important wavelenghts=
| |
|
| |
| {| border="2" cellspacing="1" cellpadding="1"
| |
| | align="center" style="background:#f0f0f0;"|'''Monitored species'''
| |
| | align="center" style="background:#f0f0f0;" width="120px"|'''Wavelength (nm)'''
| |
| |
| |
| | align="center" style="background:#f0f0f0;"|'''Monitored species'''
| |
| | align="center" style="background:#f0f0f0;" width="120px"|'''Wavelength (nm)'''
| |
| |-
| |
| | Al||308.2, 309.3, 396.1
| |
| |rowspan="11"|
| |
| | In||325.6
| |
| |-
| |
| | AlCl||261.4 || N||674.0
| |
| |-
| |
| | As||235.0 || N<sub>2</sub>||315.9, 337.1
| |
| |-
| |
| | C<sub>2</sub>||516.5 || NO||247.9, 288.5, 289.3, 303.5, 304.3, 319.8, 320.7, 337.7, 338.6
| |
| |-
| |
| | CF<sub>2</sub>||251.9 || O||777.2, 844.7
| |
| |-
| |
| | Cl||741.4 || OH||281.1, 306.4, 308.9
| |
| |-
| |
| | CN||289.8, 304.2, 387.0 || S||469.5
| |
| |-
| |
| | CO||292.5, 302.8, 313.8, 325.3, 482.5, 483.5, 519.8 || Si||288.2
| |
| |-
| |
| | F||703.7, 712.8 || SiCl||287.1
| |
| |-
| |
| | Ga||417.2 || SiF||440.1, 777.0
| |
| |-
| |
| | H||486.1, 656.5 || ||
| |
| |-
| |
| |}
| |
