Specific Process Knowledge/Etch/OES: Difference between revisions
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| Line 40: | Line 40: | ||
| AlCl||261.4 || N||674.0 | | AlCl||261.4 || N||674.0 | ||
|- | |- | ||
| As||235.0 || | | As||235.0 || N<sub>2</sub>||315.9, 337.1 | ||
|- | |- | ||
| | | C<sub>2</sub>||516.5 || NO||247.9, 288.5, 289.3, 303.5, 304.3, 319.8, 320.7, 337.7, 338.6 | ||
|- | |- | ||
| | | CF<sub>2</sub>||251.9 || O||777.2, 844.7 | ||
|- | |- | ||
| Cl||741.4 || OH||281.1, 306.4, 308.9 | | Cl||741.4 || OH||281.1, 306.4, 308.9 | ||