Specific Process Knowledge/Etch/OES: Difference between revisions
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{| border="2" cellspacing="1" cellpadding=" | {| border="2" cellspacing="1" cellpadding="1" | ||
| align="center" style="background:#f0f0f0;"|'''Monitored species''' | | align="center" style="background:#f0f0f0;"|'''Monitored species''' | ||
| align="center" style="background:#f0f0f0;" width=" | | align="center" style="background:#f0f0f0;" width="80px"|'''Wavelength (nm)''' | ||
| | | | ||
| align="center" style="background:#f0f0f0;"|'''Monitored species''' | | align="center" style="background:#f0f0f0;"|'''Monitored species''' | ||
| align="center" style="background:#f0f0f0;"|'''Wavelength (nm)''' | | align="center" style="background:#f0f0f0;"width="80px"|'''Wavelength (nm)''' | ||
|- | |- | ||
| Al||308.2, 309.3, 396.1 || || In||325.6 | | Al||308.2, 309.3, 396.1 || || In||325.6 | ||
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| Ga||417.2 || || SiF||440.1, 777.0 | | Ga||417.2 || || SiF||440.1, 777.0 | ||
|- | |- | ||
| H||486.1, 656.5 || || | | H||486.1, 656.5 || || || | ||
|- | |- | ||
|} | |} | ||