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Specific Process Knowledge/Etch/OES: Difference between revisions

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{| border="2" cellspacing="1" cellpadding="3"
{| border="2" cellspacing="1" cellpadding="1"
| align="center" style="background:#f0f0f0;"|'''Monitored species'''
| align="center" style="background:#f0f0f0;"|'''Monitored species'''
| align="center" style="background:#f0f0f0;" width="50px"|'''Wavelength (nm)'''
| align="center" style="background:#f0f0f0;" width="80px"|'''Wavelength (nm)'''
|
|
| align="center" style="background:#f0f0f0;"|'''Monitored species'''
| align="center" style="background:#f0f0f0;"|'''Monitored species'''
| align="center" style="background:#f0f0f0;"|'''Wavelength (nm)'''
| align="center" style="background:#f0f0f0;"width="80px"|'''Wavelength (nm)'''
|-
|-
| Al||308.2, 309.3, 396.1 || || In||325.6
| Al||308.2, 309.3, 396.1 || || In||325.6
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| Ga||417.2 || || SiF||440.1, 777.0
| Ga||417.2 || || SiF||440.1, 777.0
|-
|-
| H||486.1, 656.5 || ||  
| H||486.1, 656.5 || || ||
|-
|-
|}
|}