Specific Process Knowledge/Etch/OES: Difference between revisions
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| align="center" style="background:#f0f0f0;"|'''Monitored species''' | |||
| align="center" style="background:#f0f0f0;"|'''Wavelength (nm)''' | |||
|- | |||
| Al||308.2, 309.3, 396.1 | |||
|- | |||
| AlCl||261.4 | |||
|- | |||
| As||235.0 | |||
|- | |||
| C2||516.5 | |||
|- | |||
| CF2||251.9 | |||
|- | |||
| Cl||741.4 | |||
|- | |||
| CN||289.8, 304.2, 387.0 | |||
|- | |||
| CO||292.5, 302.8, 313.8, 325.3, 482.5, 483.5, 519.8 | |||
|- | |||
| F||703.7, 712.8 | |||
|- | |||
| Ga||417.2 | |||
|- | |||
| H||486.1, 656.5 | |||
|- | |||
| In||325.6 | |||
|- | |||
| N||674.0 | |||
|- | |||
| N2||315.9, 337.1 | |||
|- | |||
| NO||247.9, 288.5, 289.3, 303.5, 304.3, 319.8, 320.7, 337.7, 338.6 | |||
|- | |||
| O||777.2, 844.7 | |||
|- | |||
| OH||281.1, 306.4, 308.9 | |||
|- | |||
| S||469.5 | |||
|- | |||
| Si||288.2 | |||
|- | |||
| SiCl||287.1 | |||
|- | |||
| SiF||440.1, 777.0 | |||
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