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Specific Process Knowledge/Etch/OES: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
Line 59: Line 59:
= sdfg=
= sdfg=
{| {{table}}
{| {{table}}
| align="center" style="background:#f0f0f0;"|'''Monitored species'''
| align="center" style="background:#f0f0f0;"|'''Wavelength (nm)'''
|
| align="center" style="background:#f0f0f0;"|'''Monitored species'''
| align="center" style="background:#f0f0f0;"|'''Monitored species'''
| align="center" style="background:#f0f0f0;"|'''Wavelength (nm)'''
| align="center" style="background:#f0f0f0;"|'''Wavelength (nm)'''
|-
|-
| Al||308.2, 309.3, 396.1
| Al||308.2, 309.3, 396.1 |||| H||486.1, 656.5
|-
|-
| AlCl||261.4
| AlCl||261.4|||| In||325.6
|-
|-
| As||235.0
| As||235.0|||| N||674.0
|-
|-
| C2||516.5
| C2||516.5||||  N2||315.9, 337.1
|-
|-
| CF2||251.9
| CF2||251.9||||  NO||247.9, 288.5, 289.3, 303.5, 304.3, 319.8, 320.7, 337.7, 338.6
|-
|-
| Cl||741.4
| Cl||741.4||||  O||777.2, 844.7
|-
|-
| CN||289.8, 304.2, 387.0
| CN||289.8, 304.2, 387.0|||| OH||281.1, 306.4, 308.9
|-
|-
| CO||292.5, 302.8, 313.8, 325.3, 482.5, 483.5, 519.8
| CO||292.5, 302.8, 313.8, 325.3, 482.5, 483.5, 519.8||||S||469.5
|-
|-
| F||703.7, 712.8
| F||703.7, 712.8||||Si||288.2
|-
|-
| Ga||417.2
| Ga||417.2|||||| SiCl||287.1
|-
| H||486.1, 656.5
|-
| In||325.6
|-
| N||674.0
|-
| N2||315.9, 337.1
|-
| NO||247.9, 288.5, 289.3, 303.5, 304.3, 319.8, 320.7, 337.7, 338.6
|-
| O||777.2, 844.7
|-
| OH||281.1, 306.4, 308.9
|-
| S||469.5
|-
| Si||288.2
|-
| SiCl||287.1
|-
| SiF||440.1, 777.0
|-
|-
|  
|  
|}
|}
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