Specific Process Knowledge/Etch/OES: Difference between revisions
Appearance
| Line 8: | Line 8: | ||
{| {{table}} | {| {{table}} | ||
| align="center" style="background:#f0f0f0;" | | align="center" style="background:#f0f0f0;"|'''Monitored species''' | ||
|'''Monitored species''' | | align="center" style="background:#f0f0f0;"|'''Wavelength (nm)''' | ||
| align="center" style="background:#f0f0f0;" | |||
|'''Wavelength (nm)''' | |||
|- | |- | ||
| Al||308.2, 309.3, 396.1 | | Al||308.2, 309.3, 396.1 | ||