Specific Process Knowledge/Etch/OES: Difference between revisions

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 The section below describes
-{| {{table}}| align="center" style="background:#f0f0f0;"|'''Monitored species'''| align="center" style="background:#f0f0f0;"|'''Wavelength (nm)'''|-| Al||308.2, 309.3, 396.1|-| AlCl||261.4|-| As||235.0|-| C2||516.5|-| CF2||251.9|-| Cl||741.4|-| CN||289.8, 304.2, 387.0|-| CO||292.5, 302.8, 313.8, 325.3, 482.5, 483.5, 519.8|-| F||703.7, 712.8|-| Ga||417.2|-| H||486.1, 656.5|-| In||325.6|-| N||674.0|-| N2||315.9, 337.1|-| NO||247.9, 288.5, 289.3, 303.5, 304.3, 319.8, 320.7, 337.7, 338.6|-| O||777.2, 844.7|-| OH||281.1, 306.4, 308.9|-| S||469.5|-| Si||288.2|-| SiCl||287.1|-| SiF||440.1, 777.0|-| |}
+{| {{table}}
+| align="center" style="background:#f0f0f0;"
+|'''Monitored species'''
+| align="center" style="background:#f0f0f0;"
+|'''Wavelength (nm)'''
+|-
+| Al||308.2, 309.3, 396.1
+|-
+| AlCl||261.4
+|-
+| As||235.0
+|-
+| C2||516.5
+|-
+| CF2||251.9
+|-
+| Cl||741.4
+|-
+| CN||289.8, 304.2, 387.0
+|-
+| CO||292.5, 302.8, 313.8, 325.3, 482.5, 483.5, 519.8
+|-
+| F||703.7, 712.8
+|-
+| Ga||417.2
+|-
+| H||486.1, 656.5
+|-
+| In||325.6
+|-
+| N||674.0
+|-
+| N2||315.9, 337.1
+|-
+| NO||247.9, 288.5, 289.3, 303.5, 304.3, 319.8, 320.7, 337.7, 338.6
+|-
+| O||777.2, 844.7
+|-
+| OH||281.1, 306.4, 308.9
+|-
+| S||469.5
+|-
+| Si||288.2
+|-
+| SiCl||287.1
+|-
+| SiF||440.1, 777.0
+|-
+|
+|}