Specific Process Knowledge/Etch/OES: Difference between revisions
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{| {{table}}| align="center" style="background:#f0f0f0;"|'''Monitored species'''| align="center" style="background:#f0f0f0;"|'''Wavelength (nm)'''|-| Al||308.2, 309.3, 396.1|-| AlCl||261.4|-| As||235.0|-| C2||516.5|-| CF2||251.9|-| Cl||741.4|-| CN||289.8, 304.2, 387.0|-| CO||292.5, 302.8, 313.8, 325.3, 482.5, 483.5, 519.8|-| F||703.7, 712.8|-| Ga||417.2|-| H||486.1, 656.5|-| In||325.6|-| N||674.0|-| N2||315.9, 337.1|-| NO||247.9, 288.5, 289.3, 303.5, 304.3, 319.8, 320.7, 337.7, 338.6|-| O||777.2, 844.7|-| OH||281.1, 306.4, 308.9|-| S||469.5|-| Si||288.2|-| SiCl||287.1|-| SiF||440.1, 777.0|-| |} | |||