Specific Process Knowledge/Etch/OES: Difference between revisions
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=Optical endpoint detection on the dry etch tools at DTU Nanolab= | =Optical endpoint detection on the dry etch tools at DTU Nanolab= | ||
Several dry etch tools at DTU Nanolab are equipped with an endpoint detection system. Out of those systems only one is not of the type optical endpoint detection. | Several dry etch tools at DTU Nanolab are equipped with an endpoint detection system. Out of those systems only one is not of the type optical endpoint detection. The instruments are: | ||
* ICP Metal Etch | |||
* III-V ICP | |||
* Pegasus 1 | |||
* Pegasus 4 | |||
The section below describes | |||
Revision as of 12:59, 26 November 2020
Optical endpoint detection on the dry etch tools at DTU Nanolab
Several dry etch tools at DTU Nanolab are equipped with an endpoint detection system. Out of those systems only one is not of the type optical endpoint detection. The instruments are:
- ICP Metal Etch
- III-V ICP
- Pegasus 1
- Pegasus 4
The section below describes