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Specific Process Knowledge/Wafer and sample drying: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
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Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
1,893 edits
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<gallery caption="Different places to dry your wafers" widths="275px" heights="225px" perrow="5">  
<gallery caption="Different places to dry your wafers" widths="275px" heights="225px" perrow="5">  
image:Spin_dryer_1.jpg|Spin dryer 1 for 4 " wafers in C-1.
image:Spin_dryer_2ny.jpg|Spin dryer 2 for RCA cleaned wafers only in B-1. Can take 4" wafers (top) and 6" wafers (bottom).
image:Spin_dryer_2ny.jpg|Spin dryer 2 for RCA cleaned wafers only in B-1. Can take 4" wafers (top) and 6" wafers (bottom).
image:Spin_dryer_3.jpg|Spin dryer 3 for 4" wafers (top) and 6" wafers (bottom) in D-3.  
image:Spin_dryer_3.jpg|Spin dryer 3 for 4" wafers (top) and 6" wafers (bottom) in D-3.  
image:Spin_dryer_4.jpg|Spin dryer 4 for 4 " wafers (bottom) and 6" wafers (top) in E-4. The cabinet for 6" wafers can also be used for 2" wafers if the insert is placed in the cabinet.
image:Spin_dryer_5.JPG|Spin dryer 5 for 8", 6" and 4" wafers in the same chamber, with different carrier holders.
image:Spin_dryer_5.JPG|Spin dryer 5 for 8", 6" and 4" wafers in the same chamber, with different carrier holders.
</gallery>
</gallery>
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