Specific Process Knowledge/Thin film deposition: Difference between revisions

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== Choose material to deposit ==
== Choose material to deposit ==


=== Metals ===  
=== Metals/elements ===  
*Aluminium
{| border="1" cellspacing="0" cellpadding="7" align="center"
*Nickel
|-
*Titanium
|
*Gold
|
|
|
|
|13 Al Aluminium
|14 Si Silicon
|-
|22 Ti Titanium
|
|24 Cr Chromium
|28 Ni Nickel
|29 Cu Copper
|
|
|-
|
|
|
|46 Pd Palladium
|47 Ag Silver
|
|50 Sn Tin
|-
|
|73 Ta Tantalum
|74 W Tungsten
|78 Pt Platinum
|79 Au Gold
|
|
|-
|}
 


=== Polymers ===
=== Polymers ===

Revision as of 09:31, 24 October 2007

Choose material to deposit

Metals/elements

13 Al Aluminium 14 Si Silicon
22 Ti Titanium 24 Cr Chromium 28 Ni Nickel 29 Cu Copper
46 Pd Palladium 47 Ag Silver 50 Sn Tin
73 Ta Tantalum 74 W Tungsten 78 Pt Platinum 79 Au Gold


Polymers

  • SU8
  • Antistiction coating
  • Topas
  • PMMA

Other materials

Choose deposition equipment

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