Specific Process Knowledge/Thin film deposition/Lesker: Difference between revisions

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@@ Line 73: / Line 73: @@
 | align="center" style="background:#f0f0f0;"|'''Thickness'''
 |-
-| 3||0||0||157||0,902||
+| 3||0||0||157||0.902||
 |-
-| 6||5||0||157||0,499||44
+| 6||5||0||157||0.499||44
 |-
-| 7||10||0||157||0,142||42
+| 7||10||0||157||0.142||42
 |-
-| 8||15||0||157||0,122||40
+| 8||15||0||157||0.422||40
 |-
 |}
@@ Line 93: / Line 93: @@
 | align="center" style="background:#f0f0f0;"|'''Thickness'''
 |-
-| 12||0||5||135||1,44||123 nm (ellipsometry)
+| 12||0||5||135||1.44||123 nm (ellipsometry)
 |-
-| 13||0||9||130||1,32||98 nm (ellipsometry)
+| 13||0||9||130||1.32||98 nm (ellipsometry)
 |-
-| 14||0||13||100||1,37||71.5 nm (ellipsometry)
+| 14||0||13||100||1.37||71.5 nm (ellipsometry)
 |-
-| 15||10||9||90||0,984||56.25 nm (ellipsometry)
+| 15||10||9||90||0.984||56.25 nm (ellipsometry)
 |-
-| 21||20||9||90||0,112||
+| 21||20||9||90||0.112||
 |-
-| 22||15||9||90||0,509||
+| 22||15||9||90||0.509||
 |-
 |}
@@ Line 117: / Line 117: @@
 | align="center" style="background:#f0f0f0;"|'''Thickness'''
 |-
-| blank1||0||0||180||0,209||
+| blank1||0||0||180||0.209||
 |-
-| 16||10||0||180||0,36||56
+| 16||10||0||180||0.36||56
 |-
-| 24||20||0||180||0,357||
+| 24||20||0||180||0.357||
 |-
-| 25||20||9||180||0,202||110
+| 25||20||9||180||0.202||110
 |-
-| 26||20||5||180||0,194||95
+| 26||20||5||180||0.194||95
 |-
-| 27||15||0||180||0,413||
+| 27||15||0||180||0.413||
 |-
-| 28||25||0||180||0,164||
+| 28||25||0||180||0.164||
 |-
-| 31||30||0||180||0,3||
+| 31||30||0||180||0.3||
 |-
 |}