Specific Process Knowledge/Thin film deposition/Lesker: Difference between revisions
| Line 62: | Line 62: | ||
Other studies on metals (NiFe/MnIr) show only limited effect of the substrate bias on the roughness. | Other studies on metals (NiFe/MnIr) show only limited effect of the substrate bias on the roughness. | ||
{| {{table}} | |||
| align="center" style="background:#f0f0f0;"|'''Wafer nr''' | |||
| align="center" style="background:#f0f0f0;"|'''RF bias (W)''' | |||
| align="center" style="background:#f0f0f0;"|'''Reactive O2 (%)''' | |||
| align="center" style="background:#f0f0f0;"|'''Power(W)''' | |||
| align="center" style="background:#f0f0f0;"|'''Rq (RMS) (nm)''' | |||
| align="center" style="background:#f0f0f0;"|'''Thickness''' | |||
|- | |||
| 3||0||0||157||0,902|| | |||
|- | |||
| 6||5||0||157||0,499||44 | |||
|- | |||
| 7||10||0||157||0,142||42 | |||
|- | |||
| 8||15||0||157||0,122||40 | |||
|- | |||
| | |||
|} | |||
{| {{table}} | |||
| align="center" style="background:#f0f0f0;"|'''Wafer nr''' | |||
| align="center" style="background:#f0f0f0;"|'''RF bias (W)''' | |||
| align="center" style="background:#f0f0f0;"|'''Reactive O2 (%)''' | |||
| align="center" style="background:#f0f0f0;"|'''Power(W)''' | |||
| align="center" style="background:#f0f0f0;"|'''Rq (RMS) (nm)''' | |||
| align="center" style="background:#f0f0f0;"|'''Thickness''' | |||
|- | |||
| 12||0||5||135||1,44||123 nm (ellipsometry) | |||
|- | |||
| 13||0||9||130||1,32||98 nm (ellipsometry) | |||
|- | |||
| 14||0||13||100||1,37||71.5 nm (ellipsometry) | |||
|- | |||
| 15||10||9||90||0,984||56.25 nm (ellipsometry) | |||
|- | |||
| 21||20||9||90||0,112|| | |||
|- | |||
| 22||15||9||90||0,509|| | |||
|- | |||
| | |||
|} | |||
{| {{table}} | |||
| align="center" style="background:#f0f0f0;"|'''Wafer nr''' | |||
| align="center" style="background:#f0f0f0;"|'''RF bias (W)''' | |||
| align="center" style="background:#f0f0f0;"|'''Reactive O2 (%)''' | |||
| align="center" style="background:#f0f0f0;"|'''Power(W)''' | |||
| align="center" style="background:#f0f0f0;"|'''Rq (RMS) (nm)''' | |||
| align="center" style="background:#f0f0f0;"|'''Thickness''' | |||
|- | |||
| blank1||0||0||180||0,209|| | |||
|- | |||
| 16||10||0||180||0,36||56 | |||
|- | |||
| 24||20||0||180||0,357|| | |||
|- | |||
| 25||20||9||180||0,202||110 | |||
|- | |||
| 26||20||5||180||0,194||95 | |||
|- | |||
| 27||15||0||180||0,413|| | |||
|- | |||
| 28||25||0||180||0,164|| | |||
|- | |||
| 31||30||0||180||0,3|| | |||
|- | |||
| | |||
|} | |||