Specific Process Knowledge/Characterization/XPS: Difference between revisions
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|style="background:LightGrey; color:black"|Alternative/complementary | |style="background:LightGrey; color:black"|Alternative/complementary | ||
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* | * Work function measurements | ||
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* | * Work function measurements | ||
* Ultraviolet Photoelectron Spectroscopy (UPS) with He I and He II UV source | * Ultraviolet Photoelectron Spectroscopy (UPS) with He I and He II UV source | ||
* Ion Scattering Spectroscopy (ISS) | * Ion Scattering Spectroscopy (ISS) | ||