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| ==Dektak 8 stylus profiler==
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| [[image:Dektak 8 new position.JPG|275x275px|right|thumb|Dektak 8: positioned in cleanroom F-2.]]
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| The Dektak 8 stylus profiler is a product of Veeco Instruments. It is used for profiling surfaces of samples with structures in the micro- and nanometer range. The size of the structures that can be measured is limited by the tip dimensions.
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| It can measure specific structures found with the help of a high magnification video camera or it can be programmed to measure several points defined with respect to some deskew points. It can also be used for [[Specific_Process_Knowledge/Characterization/Stress_measurement|stress measurements]] of thin films by measuring the wafer bow.
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| '''The user manual, quality control procedure and results, technical information and contact information can be found in LabManager:'''
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| <!-- give the link to the equipment info page in LabManager: -->
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| [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=123 Dektak 8 in LabManager]
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| The original user manual can be obtained from the staff.
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| ===Equipment performance and process related parameters Dektak 8 stylus profiler===
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| {| border="2" cellspacing="0" cellpadding="10"
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| !style="background:silver; color:black;" align="left"|Purpose
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| |style="background:LightGrey; color:black"|Profiler for measuring micro structures.||style="background:WhiteSmoke; color:black"|
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| *Single line profiles
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| *Wafer mapping
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| *[[Specific_Process_Knowledge/Characterization/Stress_measurement|Stress measurements]] by measuring wafer bow
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| *Surface roughness on a line scan
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| !style="background:silver; color:black" align="left" rowspan="6" valign="top" |Performance
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| |style="background:LightGrey; color:black"|Scan range x y||style="background:WhiteSmoke; color:black"|
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| Line scan x: 50 µm to 100 mm
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| |style="background:LightGrey; color:black"|Scan range z
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| |style="background:WhiteSmoke; color:black"|
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| 50 Å to 1 mm
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| |style="background:LightGrey; color:black"|Resolution x y
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| |style="background:WhiteSmoke; color:black"|
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| Down to 0.067 µm
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| |style="background:LightGrey; color:black"|Resolution z
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| |style="background:WhiteSmoke; color:black"|
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| 1 Å, 10 Å, 40 Å or 160 Å (for ranges 65 kÅ, 655 kÅ, 2620 kÅ and 1 mm respectively)
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| |style="background:LightGrey; color:black"|Height accuracy z (95 % confidence)
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| |style="background:WhiteSmoke; color:black"|
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| ~ 300 Å for the 65 kÅ range, ~ 0.16 µm for the intermediate ranges, and ~0.6 µm for the 1 mm range for well-defined steps that are easy to measure ([[#Height measurement accuracy|see below]])
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| |style="background:LightGrey; color:black"|Max. scan depth as a function of trench width W
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| |style="background:WhiteSmoke; color:black"|
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| 1.2*(W[µm]-5µm)
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| !style="background:silver; color:black" align="left"|Hardware settings
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| |style="background:LightGrey; color:black"|Tip radius
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| |style="background:WhiteSmoke; color:black"|
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| *5 µm, 45<sup>o</sup> cone
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| !style="background:silver; color:black" align="left" rowspan="2" valign="top" |Performance
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| |style="background:LightGrey; color:black"|Substrate size
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| |style="background:WhiteSmoke; color:black"|
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| *Up to 8"
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| | style="background:LightGrey; color:black"|Substrate material allowed
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| |style="background:WhiteSmoke; color:black"|
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| *In principle all materials
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| |}
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| === Height measurement accuracy ===
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| [[#Height measurement accuracy for the DektakXT|See above for the DektakXTA]] as the considerations for the Dektak 8 are the same, though the resolution and measurement repeatability is a tiny bit better for the Dektak 8 than for the DektakXTA.
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| ==Optical Profiler (Sensofar)== | | ==Optical Profiler (Sensofar)== |
