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Thin Film TPT

DTU Nanolab offers a Tool Package Training (TPT) course in thin film growth and deposition techniques.

Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures before they apply for a training (i.e. it is possible to get a training and then attend the lectures afterwards).

Thin film tool package training (TPT)
Schedule	Theoretical part 1^st lecture (2 hours): An introduction to thin films Material properties Overview of different thin film techniques at DTU Nanolab – 1^st part: Thermal oxidation Electroplating Sign up for the next lecture here: https://danchip.doodle.com/poll/k4pdm2n4bpseww5e. The next lecture will be held on the 17th of August from 10.00-12.00. Hopefully, the lecture can be held one DTU, but because the number of people in the available rooms at DTU Nanolab is limited, it might be necessary to make an online lecture instead or to make an arrange lecture. If you sign up for the lecture, you will get more information later. Please also note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk. 2^nd lecture (3 hours): Vacuum basics Overview of different thin film techniques at DTU Nanolab – 2^nd part: PVD (physical vapour deposition) E-beam evaporation Thermal evaporation Sputtering CVD (chemical vapour depostion) LPCVD (low pressure chemical vapour deposition) PECVD (plasma enhanced chemical vapour deposition) ALD (atomic layer deposition) Sign up for the next lecture here: https://danchip.doodle.com/poll/4r3ydwzzbrdepgpf The next lecture will be held on the 24th of August from 10.00-12.00. Hopefully, the lecture can be held one DTU, but because the number of people in the available rooms at DTU Nanolab is limited, it might be necessary to make an online lecture instead or to make an arrange lecture. If you sign up for the lecture, you will get more information later. Please also note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk. Practical part None
Location	Theoretical part The location of the lectures will be notified in the doodles
Qualified prerequisites	None
Preparations	Read Sami Franssila "Introduction to Microfabrication" (2010), Chapter 5: Thin-Film Materials and Processes (Available online from DTU campus).
Course responsible	The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk)
Learning goals	Be aware of relevant material properties for thin films made in the cleanroom Understand importance of correct process pressure (for vacuum processes) Understand different thin film techniques Compare and be able to select appropriate thin film technique

Material for preparations and further information

Slides from the lectures

Slides from lecture 1

Lecture slide show Media:1_DTU_Nanolab_Thin_Film_TPT_final_May_2020.pptx‎

Slides from lecture 2

Lecture slide show Media:2_DTU_Nanolab_Thin_Film_TPT_final_May_2020.pptx

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Literature

Thermal Oxidation

S. Franssila, (2010), Introduction to Microfabrication, Chapter 13: Thermal Oxidation

@@ Line 29: / Line 29: @@
 <i>Sign up for the next lecture here: https://danchip.doodle.com/poll/k4pdm2n4bpseww5e.
-The next lecture will be held on the 17th of August from 10.00-12.00. Hopefully, the lecture can be held one DTU, but because the number of people in the available rooms at DTU Nanolab, it might be necessary to make an online lecture instead or to make an arrange lecture. If you sign up for the lecture, you will get more information later.
+The next lecture will be held on the 17th of August from 10.00-12.00. Hopefully, the lecture can be held one DTU, but because the number of people in the available rooms at DTU Nanolab is limited, it might be necessary to make an online lecture instead or to make an arrange lecture. If you sign up for the lecture, you will get more information later.
 Please also note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i>
@@ Line 50: / Line 50: @@
 <i>Sign up for the next lecture here: https://danchip.doodle.com/poll/4r3ydwzzbrdepgpf
-The next lecture will be held on the 24th of August from 10.00-12.00. Hopefully, the lecture can be held one DTU, but because the number of people in the available rooms at DTU Nanolab, it might be necessary to make an online lecture instead or to make an arrange lecture. If you sign up for the lecture, you will get more information later.
+The next lecture will be held on the 24th of August from 10.00-12.00. Hopefully, the lecture can be held one DTU, but because the number of people in the available rooms at DTU Nanolab is limited, it might be necessary to make an online lecture instead or to make an arrange lecture. If you sign up for the lecture, you will get more information later.
 Please also note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i>