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Specific Process Knowledge/Characterization/Profiler: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
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Reet (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
1,736 edits
→Dektak 8 stylus profiler: edited height measurement section
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*Surface roughness on a line scan
*Surface roughness on a line scan
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!style="background:silver; color:black" align="left" rowspan="5" valign="top" |Performance
!style="background:silver; color:black" align="left" rowspan="6" valign="top" |Performance
|style="background:LightGrey; color:black"|Scan range x y||style="background:WhiteSmoke; color:black"|
|style="background:LightGrey; color:black"|Scan range x y||style="background:WhiteSmoke; color:black"|
Line scan x: 50 µm to 100 mm
Line scan x: 50 µm to 100 mm
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=== Height measurement accuracy ===
=== Height measurement accuracy ===
The accuracy of the step height calibration is 0.15 µm for the 24.865 µm standard and 30 Å for the 9160 Å standard. These values are equivalent to twice the standard deviation, or 95 % confidence intervals.
[[#Height accuracy|See above for the DektakXTA]] as the considerations for the Dektak 8 are the same though the resolution and measurement repeatability is a tiny bit better for the Dektak 8 than for the DektakXTA.


==Optical Profiler (Sensofar)==
==Optical Profiler (Sensofar)==
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