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| |} | | |} |
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| ===Quality control of measurement accuracy===
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| {| border="1" cellspacing="2" cellpadding="2" colspan="3"
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| |bgcolor="#98FB98" |'''Quality Control (QC) for DektakXTA'''
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| |-
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| *[http://labmanager.dtu.dk/d4Show.php?id=2493&mach=304 QC procedure for DektakXTA]<br>
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| *[https://labmanager.dtu.dk/view_binary.php?type=data&mach=304 Newest QC data for DektakXTA]<br>
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| {| {{table}}
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| | align="center" valign="top"|
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| {| border="2" cellspacing="1" cellpadding="2" align="center" style="width:500px"
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| !QC limits
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| !Standard step height 24.865 µm
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| !Standard step height 9160 Å
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| |-
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| |Calibration limit
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| |± 0.15 µm
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| |± 102 Å
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| |-
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| |Action limit
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| |± 0.11 µm
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| |± 137 Å
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| |-
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| |}
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| |-
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| |}
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| |}
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| If the average value is outside the calibration limit, the instrument is calibrated straight away.
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| If the average value is within the calibration limit, but outside of the action limit, the control measurement should be redone after 1 week. If two consecutive measurements for a range are outside the action limit, the range should be calibrated.
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| The accuracy of the step height calibration is 0.15 µm for the 24.865 µm standard and 30 Å for the 9160 Å standard. These values are equivalent to twice the standard deviation, or 95 % confidence intervals. | | The accuracy of the step height calibration is 0.15 µm for the 24.865 µm standard and 30 Å for the 9160 Å standard. These values are equivalent to twice the standard deviation, or 95 % confidence intervals. |
