Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy: Difference between revisions
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|style="background:LightGrey; color:black"|[[#Height | |style="background:LightGrey; color:black"|[[#Height Accuracy|Height (z) accuracy]] | ||
|style="background:WhiteSmoke; color:black"|better than 2% (at 200 nm), typically better then 0.75% | |style="background:WhiteSmoke; color:black"|better than 2% (at 200 nm), typically better then 0.75% | ||
|style="background:WhiteSmoke; color:black"|better than 2% (at 200 nm), typically better then 0.75% | |style="background:WhiteSmoke; color:black"|better than 2% (at 200 nm), typically better then 0.75% | ||