LabAdviser/Courses/TPT Thin Film: Difference between revisions
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======Thermal Oxidation====== | ======Thermal Oxidation====== | ||
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch13/pdf S. Franssila, (2010), Introduction to Microfabrication, Chapter 13: Thermal Oxidation] | *[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch13/pdf S. Franssila, (2010), Introduction to Microfabrication, Chapter 13: Thermal Oxidation] | ||
======Stress in Thin Films====== | |||
*[https://avs.scitation.org/doi/10.1116/1.5011790 Journal of Vacuum Science & Technology A 36, 020801 (2018) Review Article: Stress in thin films and coatings: Current status, challenges, | |||
and prospects] | |||