LabAdviser/Courses/TPT Thin Film

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Thin Film TPT

DTU Nanolab offers a Tool Package Training (TPT) course in thin film growth and deposition techniques.

Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures before they apply for a training (i.e. it is possible to get a training and then attend the lectures afterwards).

Thin film tool package training (TPT)
Schedule	Theoretical part 1st lecture (2 hours): An introduction to thin films Material properties Overview of different thin film techniques at DTU Nanolab – 1st part: Thermal oxidation Electroplating Sign up for the next lecture here: https://danchip.doodle.com/poll/k4pdm2n4bpseww5e. The next lecture will be held online (using Zoom) on the 28th of May from 10.00 to 12.30 2nd lecture (3 hours): Vacuum basics Overview of different thin film techniques at DTU Nanolab – 2nd part: PVD (physical vapour deposition) E-beam evaporation Thermal evaporation Sputtering CVD (chemical vapour depostion) LPCVD (low pressure chemical vapour deposition) PECVD (plasma enhanced chemical vapour deposition) ALD (atomic layer deposition) Sign up for the next lecture here: https://danchip.doodle.com/poll/4r3ydwzzbrdepgpf The next lecture will be held online (using Zoom) on the 4th of June from 9.00 to 12.30 Practical part None
Location	Theoretical part The location of the lectures will be notified in the doodles
Qualified prerequisites	None
Preparations	Read Sami Franssila "Introduction to Microfabrication" (2010), Chapter 5: Thin-Film Materials and Processes (Available online from DTU campus).
Course responsible	The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk)
Learning goals	Be aware of relevant material properties for thin films made in the cleanroom Understand importance of correct process pressure (for vacuum processes) Understand different thin film techniques Compare and be able to select appropriate thin film technique

Material for preparations and further information

Slides from the lectures

Slides from lecture 1

• Lecture slide show Media:1_DTU_Nanolab_Thin_Film_TPT_final_May_2020.pptx‎

Slides from lecture 2

• Lecture slide show Media:2_DTU_Nanolab_Thin_Film_TPT_final_May_2020.pptx

Literature

• S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes
• S. Franssila, (2010), Introduction to Microfabrication, Chapter 7: Advanced Thin Films
• D. M. Mattox,(2015) Handbook of Physical Vapor Deposition (PVD) Processing (Second Edition), Chapter 10: Atomistic Film Growth and Some Growth-Related Film Properties
• K. Oura et al., (2003), Surface Science, Chapter 14: Growth of Thin Films

Thermal Oxidation

• S. Franssila, (2010), Introduction to Microfabrication, Chapter 13: Thermal Oxidation

Stress in Thin Films

• [https://avs.scitation.org/doi/10.1116/1.5011790 Journal of Vacuum Science & Technology A 36, 020801 (2018) Review Article: Stress in thin films and coatings: Current status, challenges,

and prospects]