Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Si Nano etching: Difference between revisions
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'''The CORE recipe is shown as below''' | '''The CORE recipe is shown as below''' | ||
[[File:CORE.png|800px]] | [[File:CORE.png|800px]] | ||
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'''''Submicron silicon trenches and lines derived from the fine-tuned CORE sequence.''''' | '''''Submicron silicon trenches and lines derived from the fine-tuned CORE sequence.''''' | ||
[[File:Fig 13a.png|800px]] | [[File:Fig 13a.png|800px]] | ||