Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
| Line 35: | Line 35: | ||
|- | |- | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
!rowspan="2"| AZ 5206E | !rowspan="2"| AZ 5206E<sup>1)</sup> | ||
|rowspan="2"| 0.5 µm | |rowspan="2"| 0.5 µm | ||
|rowspan="2"| 375 nm | |rowspan="2"| 375 nm | ||
| Line 120: | Line 120: | ||
|} | |} | ||
<sup>1)</sup> AZ5214E diluted with PGMEA 1:1 per volume. | |||
<br clear="all" /> | <br clear="all" /> | ||