Specific Process Knowledge/Thin film deposition/Furnace LPCVD Nitride: Difference between revisions
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==Process Knowledge== | ==Process Knowledge== | ||
Please take a look at the process side to get more information about deposition of | Please take a look at the process side to get more information about deposition of silicon nitride using an LPCVD furnace: | ||
[[Specific Process Knowledge/Thin film deposition/Deposition of Silicon Nitride/Deposition of Silicon Nitride using LPCVD|Deposition of Silicon Nitride using LPCVD]] | [[Specific Process Knowledge/Thin film deposition/Deposition of Silicon Nitride/Deposition of Silicon Nitride using LPCVD|Deposition of Silicon Nitride using LPCVD]] | ||
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==Overview of the performance of LPCVD Silicon Nitride and some process related parameters== | ==Overview of the performance of LPCVD Silicon Nitride and some process related parameters== | ||