Specific Process Knowledge/Thin film deposition/Deposition of Aluminium: Difference between revisions
m →Comparison of Al deposition options: deleted repeated info |
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It is possible to tilt the substrate. | It is possible to tilt the substrate. | ||
|'''**''' Thickness above 200 nm: ask for permission. | |'''**''' Thickness above 200 nm: ask for permission. | ||
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|'''*''' Thickness above 600 nm: ask for permission. | |'''*''' Thickness above 600 nm: ask for permission. | ||
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|'''***'''Thickness above 120 nm: ask for permission | |'''***'''Thickness above 120 nm: ask for permission | ||
|'''**'''Thickness above 200 nm: ask for permission. | |'''**'''Thickness above 200 nm: ask for permission. | ||
|} | |} | ||