Specific Process Knowledge/Thin film deposition/Deposition of Aluminium: Difference between revisions
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==Sputtering of Aluminium== | ==Sputtering of Aluminium== | ||
Aluminium may be sputter deposited in either the Wordentec, the [[Specific Process Knowledge/Thin film deposition/Lesker|Sputter-system (Lesker)]] or the [[ | Aluminium may be sputter deposited in either the Wordentec, the [[Specific Process Knowledge/Thin film deposition/Lesker|Sputter-system (Lesker)]] or the [[Specific Process Knowledge/Thin film deposition/Cluster-based multi-chamber high vacuum sputtering deposition system|Cluster-based sputter system]]. | ||
|Cluster-based sputter system]]. | |||
*[[/Sputter rates for Al|Sputtering of Aluminium in the Wordentec]] | *[[/Sputter rates for Al|Sputtering of Aluminium in the Wordentec]] | ||