Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 03 processing: Difference between revisions
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'''Overview''' X = ±??mm; Y = +10?mm to -??mm <br> | '''Overview''' X = ±??mm; Y = +10?mm to -??mm <br> | ||
To be sure the Overview camera can be used to locate the first alignment mark, it is advised to use a mark in the bottom left portion (3<sup>rd</sup> quadrant) of the design as mark 1. <br> | To be sure the Overview camera can be used to locate the first alignment mark, it is advised to use a mark in the bottom left portion (3<sup>rd</sup> quadrant) of the design as mark 1. <br> | ||
{| cellpadding="2" style="border: 2px solid darkgray;" align="right" | |||
! width="320" | | |||
! width="320" | | |||
! width="320" | | |||
|+'''Camera views during alignment on Aligner: Maskless 03''' | |||
|- border="0" align="center" | |||
|[[Image:MLA150 TSA Overview.JPG|300px]] | |||
|[[Image:MLA150_BSA_Backside.JPG|300px]] | |||
|[[Image:MLA150_TSA_Low_Res.JPG|300px]] | |||
|- align="center" | |||
| Overview camera image of a TSA alignment mark during alignment.<br/> The circle is 3mm in diameter, the alignment mark is 300µm. The blue cross-hair is ~400µm. || Low Res camera image of a TSA alignment mark during alignment.<br/> The lines of the cross are 20µm wide. The blue cross-hair is ~7µm. || High Res camera image of a TSA alignment mark during alignment.<br/> The lines of the central cross are 3µm wide. The blue cross-hair is ~2µm. | |||
|} | |||
<br clear="all" /> | |||
==Back Side Alignment== | ==Back Side Alignment== | ||