Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions
| Line 219: | Line 219: | ||
|TableHeader=Variations of the DREM 3kW recipe | |TableHeader=Variations of the DREM 3kW recipe | ||
}} | }} | ||
{{Template: | {{Template:Peg1RecipeTableVerCAddrowColors | ||
|RecipeName=DREM 3kW 100% | |RecipeName=DREM 3kW 100% | ||
|PriorProcessSteps= Pump to base, Clamp Substrate, preset matching unit step | |PriorProcessSteps= Pump to base, Clamp Substrate, preset matching unit step | ||
| Line 231: | Line 231: | ||
|SF6DepDelay=0.3@200 |SF6DepBoost= |SF6DepMain=15 | |SF6DepDelay=0.3@200 |SF6DepBoost= |SF6DepMain=15 | ||
|SF6EtchDelay=1.1@15 |SF6EtchBoost=0.3@200 |SF6EtchMain=900 | |SF6EtchDelay=1.1@15 |SF6EtchBoost=0.3@200 |SF6EtchMain=900 | ||
|ArDep=200 |ArEtch=3@250,250 | |||
|WCoilDep=3 |WCoilEtch=3 |WPlatenDep=0 | |WCoilDep=3 |WCoilEtch=3 |WPlatenDep=0 | ||
|WPlatenEtchDelay=0.6@1 |WPlatenEtchBoost=05@300 |WPlatenEtchMain=0.1 | |WPlatenEtchDelay=0.6@1 |WPlatenEtchBoost=05@300 |WPlatenEtchMain=0.1 | ||
| Line 240: | Line 240: | ||
|Link2RecipeRun=[[Specific Process Knowledge/Etch/DRIE-Pegasus/DREM/DREM 3kW 100% | '''1''']] | |Link2RecipeRun=[[Specific Process Knowledge/Etch/DRIE-Pegasus/DREM/DREM 3kW 100% | '''1''']] | ||
}} | }} | ||
{{Template: | {{Template:Peg1RecipeTableVerCAddrowColors | ||
|RecipeName=DREM 3kW 100% a | |RecipeName=DREM 3kW 100% a | ||
|PriorProcessSteps= Pump to base, Clamp Substrate, preset matching unit step | |PriorProcessSteps= Pump to base, Clamp Substrate, preset matching unit step | ||
| Line 252: | Line 252: | ||
|SF6DepDelay=0.3@200 |SF6DepBoost= |SF6DepMain=15 | |SF6DepDelay=0.3@200 |SF6DepBoost= |SF6DepMain=15 | ||
|SF6EtchDelay='''1.2@15''' |SF6EtchBoost=0.3@200 |SF6EtchMain=900 | |SF6EtchDelay='''1.2@15''' |SF6EtchBoost=0.3@200 |SF6EtchMain=900 | ||
|ArDep=200 |ArEtch=3@250,250 | |||
|WCoilDep=3 |WCoilEtch=3 |WPlatenDep=0 | |WCoilDep=3 |WCoilEtch=3 |WPlatenDep=0 | ||
|WPlatenEtchDelay=0.6@1 |WPlatenEtchBoost='''0.6@300''' |WPlatenEtchMain=0.1 | |WPlatenEtchDelay=0.6@1 |WPlatenEtchBoost='''0.6@300''' |WPlatenEtchMain=0.1 | ||
| Line 261: | Line 261: | ||
|Link2RecipeRun=[[Specific Process Knowledge/Etch/DRIE-Pegasus/DREM/DREM 3kW 100% a| '''1''']] | |Link2RecipeRun=[[Specific Process Knowledge/Etch/DRIE-Pegasus/DREM/DREM 3kW 100% a| '''1''']] | ||
}} | }} | ||
{{Template: | {{Template:Peg1RecipeTableVerCAddrowColors | ||
|RecipeName=DREM 3kW 100% b | |RecipeName=DREM 3kW 100% b | ||
|PriorProcessSteps= Pump to base, Clamp Substrate, preset matching unit step | |PriorProcessSteps= Pump to base, Clamp Substrate, preset matching unit step | ||
| Line 273: | Line 273: | ||
|SF6DepDelay=0.3@200 |SF6DepBoost= |SF6DepMain=15 | |SF6DepDelay=0.3@200 |SF6DepBoost= |SF6DepMain=15 | ||
|SF6EtchDelay=1.2@15 |SF6EtchBoost=0.3@200 |SF6EtchMain=900 | |SF6EtchDelay=1.2@15 |SF6EtchBoost=0.3@200 |SF6EtchMain=900 | ||
|ArDep=200 |ArEtch=3@250,250 | |||
|WCoilDep=3 |WCoilEtch=3 |WPlatenDep=0 | |WCoilDep=3 |WCoilEtch=3 |WPlatenDep=0 | ||
|WPlatenEtchDelay=0.6@1 |WPlatenEtchBoost=0.6@300 |WPlatenEtchMain=0.1 | |WPlatenEtchDelay=0.6@1 |WPlatenEtchBoost=0.6@300 |WPlatenEtchMain=0.1 | ||