Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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|'''X''' | |'''X''' | ||
| -0.625±0.125 | | -0.625±0.125 | ||
|rowspan="2" align="center"|0.5µm verniers | |rowspan="2" align="center"|0.5µm verniers | ||
Taran May 2019 | |||
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|'''X''' | |'''X''' | ||
| -0.625±0.125 | | -0.625±0.125 | ||
|rowspan="2" align="center"|0.5µm verniers | |rowspan="2" align="center"|0.5µm verniers | ||
Taran May 2019 | |||
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