Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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| Line 848: | Line 848: | ||
|rowspan="2" align="center"|25 fields | |rowspan="2" align="center"|25 fields | ||
375nm, high res camera | 375nm, high res camera | ||
(Taran Mar 2019) | |||
|'''X''' | |'''X''' | ||
| 50±75 | | 50±75 | ||
| Line 862: | Line 864: | ||
|rowspan="2" align="center"|Scaled first print, 10 fields | |rowspan="2" align="center"|Scaled first print, 10 fields | ||
375nm, high res camera | 375nm, high res camera | ||
(Taran Mar 2019) | |||
|'''X''' | |'''X''' | ||
| -25±50 | | -25±50 | ||
| Line 876: | Line 880: | ||
|rowspan="2" align="center"|25 fields | |rowspan="2" align="center"|25 fields | ||
405nm, high res camera | 405nm, high res camera | ||
(Taran Mar 2019) | |||
|'''X''' | |'''X''' | ||
| 100±75 | | 100±75 | ||