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Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions

Taran (talk | contribs)
Taran (talk | contribs)
Line 848: Line 848:
|rowspan="2" align="center"|25 fields
|rowspan="2" align="center"|25 fields
375nm, high res camera
375nm, high res camera
(Taran Mar 2019)
|'''X'''
|'''X'''
| 50±75
| 50±75
Line 862: Line 864:
|rowspan="2" align="center"|Scaled first print, 10 fields
|rowspan="2" align="center"|Scaled first print, 10 fields
375nm, high res camera
375nm, high res camera
(Taran Mar 2019)
|'''X'''
|'''X'''
| -25±50
| -25±50
Line 876: Line 880:
|rowspan="2" align="center"|25 fields
|rowspan="2" align="center"|25 fields
405nm, high res camera
405nm, high res camera
(Taran Mar 2019)
|'''X'''
|'''X'''
| 100±75
| 100±75