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Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions

Taran (talk | contribs)
Taran (talk | contribs)
Line 617: Line 617:
|rowspan="2"|2 alignment marks
|rowspan="2"|2 alignment marks
375nm, high res camera
375nm, high res camera
(Taran Apr 2019)
|'''X'''
|'''X'''
|NA
|NA
Line 638: Line 640:
|rowspan="2"|4 alignment marks
|rowspan="2"|4 alignment marks
375nm, high res camera
375nm, high res camera
(Taran Apr 2019)
|'''X'''
|'''X'''
| -1
| -1
Line 659: Line 663:
|rowspan="2"|4 alignment marks
|rowspan="2"|4 alignment marks
375nm, low res camera
375nm, low res camera
(Taran Apr 2019)
|'''X'''
|'''X'''
| -6
| -6
Line 697: Line 703:
|rowspan="2"|4 alignment marks
|rowspan="2"|4 alignment marks
375nm, high res camera
375nm, high res camera
(Taran Mar 2019)
|'''X'''
|'''X'''
| 100
| 100
Line 718: Line 726:
|rowspan="2"|4 alignment marks
|rowspan="2"|4 alignment marks
375nm, high res camera
375nm, high res camera
(Taran Mar 2019)
|'''X'''
|'''X'''
| not used
| not used