Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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| Line 617: | Line 617: | ||
|rowspan="2"|2 alignment marks | |rowspan="2"|2 alignment marks | ||
375nm, high res camera | 375nm, high res camera | ||
(Taran Apr 2019) | |||
|'''X''' | |'''X''' | ||
|NA | |NA | ||
| Line 638: | Line 640: | ||
|rowspan="2"|4 alignment marks | |rowspan="2"|4 alignment marks | ||
375nm, high res camera | 375nm, high res camera | ||
(Taran Apr 2019) | |||
|'''X''' | |'''X''' | ||
| -1 | | -1 | ||
| Line 659: | Line 663: | ||
|rowspan="2"|4 alignment marks | |rowspan="2"|4 alignment marks | ||
375nm, low res camera | 375nm, low res camera | ||
(Taran Apr 2019) | |||
|'''X''' | |'''X''' | ||
| -6 | | -6 | ||
| Line 697: | Line 703: | ||
|rowspan="2"|4 alignment marks | |rowspan="2"|4 alignment marks | ||
375nm, high res camera | 375nm, high res camera | ||
(Taran Mar 2019) | |||
|'''X''' | |'''X''' | ||
| 100 | | 100 | ||
| Line 718: | Line 726: | ||
|rowspan="2"|4 alignment marks | |rowspan="2"|4 alignment marks | ||
375nm, high res camera | 375nm, high res camera | ||
(Taran Mar 2019) | |||
|'''X''' | |'''X''' | ||
| not used | | not used | ||