Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions
| Line 70: | Line 70: | ||
|Depending on the objective: | |Depending on the objective: | ||
*0.5µm -> 5µm | *0.5µm -> 5µm | ||
| | |Resolving power og the lense: 0.92 µm | ||
|Depending on scan size and number of samples per line and number of lines - accuracy better than 2% | |Depending on scan size and number of samples per line and number of lines - accuracy better than 2% | ||
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