Specific Process Knowledge/Characterization/XPS: Difference between revisions
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!rowspan="2" style="background:silver; color:black" align="left"|Substrates / Samples | !rowspan="2" style="background:silver; color:black" align="left"|Substrates / Samples | ||
|style="background:LightGrey; color:black"|Sample holder size: | |style="background:LightGrey; color:black"|Sample holder size | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| Maximum 60x60 mm | ||
Maximum 60x60 mm | |style="background:WhiteSmoke; color:black"| Maximum 60x60 mm | ||
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| style="background:LightGrey; color:black"| | | style="background:LightGrey; color:black"|Sample height | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| Maximum 20 mm | ||
Maximum | |style="background:WhiteSmoke; color:black"| Maximum 20 mm | ||
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