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| Line 512: |
Line 512: |
| |- | | |- |
| |-style="background:white; color:black; vertical-align:middle; text-align:center;" | | |-style="background:white; color:black; vertical-align:middle; text-align:center;" |
| !Microscope | | !Nikon SMZ 1000 |
| !Location | | !Noco IR |
| !Responsible Group | | !Leica INM 100 |
| !Objectives | | !Nikon Eclipse L200 #2 |
| !Ocular | | !Zeiss Jenatech |
| !Special features | | !Nikon Eclipse L200 #1 |
| !Features | | !Leitz Medilux |
| !Camera | | !Nikon Eclipse L200N #3 |
| !Analysis software | | !Nikon Eclipse L200N #4 |
| | !Nikon ME 600 |
| | !Leica S8 APO |
| | !Zeiss Axiotron |
| |- | | |- |
|
| |
|
| |- | | |- |
| |-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;" | | |-style="background:white; color:black; vertical-align:middle; text-align:center;" |
| !Nikon SMZ 1000[[image:Nikon SMZ 1000.jpg|100x100px|thumb|center]]
| | |[[image:Nikon SMZ 1000.jpg|100x100px|thumb|center]] |
| |346-901 | | |[[image:Noco IR microscope.jpg|100x100px|thumb|center]][[image:Noco IR microscope_1.jpg|100x100px|thumb|center]] |
| |Wet chemistry
| | |[[image:Nikon SMZ 1000.jpg|100x100px|thumb|center]] |
| |Zoom 0.8x - 8x
| | |[[image:Nikon Eclipse L200 2.jpg|100x100px|thumb|center]][[image:Nikon Eclipse L200 2_1.jpg|100x100px|thumb|center]] |
| |10x
| | |[[image:Zeiss Jenatech strain.jpg|100x100px|thumb|center]][[image:Zeiss Jenatech strain_1.jpg|100x100px|thumb|center]] |
| |Stereoscopic microscope
| | |[[image:Nikon Eclipse L200.jpg|100x100px|thumb|center]][[image:Nikon Eclipse L200_1.jpg|100x100px|thumb|center]] |
| |Episcopic
| | |[[image:Leitz Medilux.jpg|100x100px|thumb|center]] |
| |No
| | |[[image:Nikon Eclipse L 200 3_1.jpg|100x100px|thumb|center]] |
| |No
| | |[[image:Nikon Eclipse L 200 4_1.jpg|100x100px|thumb|center]] |
| |-
| | |[[image:Nikon ME 600.jpg|100x100px|thumb|center]][[image:Nikon ME 600_1.jpg|100x100px|thumb|center]] |
| | | |[[image:Leica S8 APO.jpg|100x100px|thumb|center]] |
| |-
| | |[[image:Zeiss Axiotron.jpg|100x100px|thumb|center]][[image:Zeiss Axiotron_1.jpg|100x100px|thumb|center]] |
| |-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
| |
| !Noco IR[[image:Noco IR microscope.jpg|100x100px|thumb|center]][[image:Noco IR microscope_1.jpg|100x100px|thumb|center]]
| |
| |346-901 | |
| |Wet chemistry
| |
| |
| |
| *2.5x
| |
| *10x
| |
| *20x
| |
| *50x
| |
| |10x
| |
| |IR imaging
| |
| |
| |
| *Polarizer
| |
| *Episcopic
| |
| *Diascopic
| |
| *Brightfield
| |
| |IR camera
| |
| |No
| |
| |-
| |
| | |
| |-
| |
| |-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
| |
| !Leica INM100[[image:Nikon SMZ 1000.jpg|100x100px|thumb|center]]
| |
| |346-901 | |
| |Wet chemistry
| |
| |
| |
| *2.5x
| |
| *5x
| |
| *10x
| |
| *20x
| |
| *50x
| |
| |10x
| |
| |
| |
| |
| |
| *Episcopic
| |
| *Diascopic
| |
| *Brightfield
| |
| *Darkfield
| |
| |DS-Fi2
| |
| |NIS-D
| |
| |-
| |
| | |
| |-
| |
| |-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
| |
| !Nikon Eclipse L200 #2[[image:Nikon Eclipse L200 2.jpg|100x100px|thumb|center]][[image:Nikon Eclipse L200 2_1.jpg|100x100px|thumb|center]]
| |
| |C1 | |
| |Thin Film
| |
| |
| |
| *2.5x
| |
| *5x
| |
| *10x
| |
| *20x
| |
| *50x
| |
| *100x
| |
| |10x | |
| | | |
| | | |
| *Episcopic
| |
| *Diascopic
| |
| *Brightfield
| |
| *Darkfield
| |
| |DS-Fi1 | |
| |NIS-D | |
| |- | |
| | |
| |-
| |
| |-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;" | |
| !Zeiss Jenatech[[image:Zeiss Jenatech strain.jpg|100x100px|thumb|center]][[image:Zeiss Jenatech strain_1.jpg|100x100px|thumb|center]]
| |
| |C1 | |
| |Thin Film | |
| | | |
| *5x
| |
| *10x
| |
| *20x
| |
| *50x
| |
| *100x
| |
| |10x | |
| | | |
| | | |
| *Polarizer
| |
| *Episcopic
| |
| *Diascopic
| |
| *Brightfield
| |
| |No | |
| |No | |
| |- | |
| | |
| |- | |
| |-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;" | |
| !Nikon Eclipse L200 #1[[image:Nikon Eclipse L200.jpg|100x100px|thumb|center]][[image:Nikon Eclipse L200_1.jpg|100x100px|thumb|center]]
| |
| |D3 | |
| |Thin Film | |
| | | |
| *2.5x
| |
| *5x
| |
| *10x
| |
| *20x
| |
| *50x
| |
| *100x
| |
| |10x | |
| | | |
| *Motorized stage
| |
| *'''[[Specific_Process_Knowledge/Characterization/Optical microscope/Nikon Eclipse L200 auto scan guide|Auto scan guide]]'''
| |
| | | |
| *Episcopic
| |
| *Diascopic
| |
| *Brightfield
| |
| *Darkfield
| |
| |DS-Fi1 | |
| |NIS-BR | |
| |- | | |- |
|
| |
|
| |- | | |- |
| |-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;" | | |-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;" |
| !Leitz Medilux[[image:Leitz Medilux.jpg|100x100px|thumb|center]]
| |
| |D3
| |
| |Thin Film
| |
| | | | | |
| *2.5x
| |
| *5x
| |
| *10x
| |
| *20x
| |
| *50x
| |
| |10x
| |
| |
| |
| |
| |
| *Episcopic
| |
| *Diascopic
| |
| *Brightfield
| |
| |DX40-274FW
| |
| |Kappa Control Center
| |
| |- | | |- |
|
| |
|
| |- | | |- |
| |-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;" | | |-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;" |
| !Nikon Eclipse L200N #3[[image:Nikon Eclipse L 200 3_1.jpg|100x100px|thumb|center]]
| |
| |E4
| |
| |Lithography
| |
| |
| |
| *2.5x
| |
| *5x
| |
| *10x
| |
| *20x
| |
| *50x
| |
| *100x
| |
| |10x
| |
| |
| |
| |
| |
| *Polarizer
| |
| *Episcopic
| |
| *Diascopic
| |
| *Brightfield
| |
| *Darkfield
| |
| |
| |
| *DS-Fi2
| |
| *C-mount, 0.7x relay
| |
| |NIS-D
| |
| |-
| |
|
| |
| |-
| |
| |-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
| |
| !Nikon Eclipse L200N #4[[image:Nikon Eclipse L 200 4_1.jpg|100x100px|thumb|center]]
| |
| |E5
| |
| |Lithography
| |
| |
| |
| *2.5x
| |
| *5x
| |
| *10x
| |
| *20x
| |
| *50x
| |
| *100x
| |
| |10x
| |
| |
| |
| |
| |
| *Polarizer
| |
| *Episcopic
| |
| *Diascopic
| |
| *Brightfield
| |
| *Darkfield
| |
| |
| |
| *DS-Fi2
| |
| *C-mount, 0.7x relay
| |
| |NIS-D
| |
| |-
| |
|
| |
| |-
| |
| |-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
| |
| !Nikon ME 600[[image:Nikon ME 600.jpg|100x100px|thumb|center]][[image:Nikon ME 600_1.jpg|100x100px|thumb|center]]
| |
| |F1
| |
| |Thin Film
| |
| |
| |
| *5x
| |
| *10x
| |
| *20x
| |
| *50x
| |
| *100x
| |
| |10x
| |
| |
| |
| |
| |
| *Polarizer
| |
| *Episcopic
| |
| *Brightfield
| |
| *Darkfield
| |
| |DS-Fi2
| |
| |NIS-D
| |
| |-
| |
|
| |
| |-
| |
| |-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
| |
| !Leica S8 APO[[image:Leica S8 APO.jpg|100x100px|thumb|center]]
| |
| |F2
| |
| |Thin Film
| |
| |Zoom 1x - 8x
| |
| |10x
| |
| |Stereoscopic microscope
| |
| |Episcopic
| |
| |No
| |
| |No
| |
| |-
| |
|
| |
| |-
| |
| |-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
| |
| !Zeiss Axiotron[[image:Zeiss Axiotron.jpg|100x100px|thumb|center]][[image:Zeiss Axiotron_1.jpg|100x100px|thumb|center]]
| |
| |F3
| |
| |Lithography
| |
| |
| |
| *5x
| |
| *10x
| |
| *20x
| |
| *50x
| |
| |10x
| |
| |
| |
| | | | | |
| *Episcopic
| |
| *Diascopic
| |
| *Brightfield
| |
| *Darkfield
| |
| |Infinity X
| |
| |DeltaPix
| |
| |- | | |- |
|
| |
|
THIS PAGE IS UNDER CONSTRUCTION
Feedback to this page: click here
|
|
Zeiss Jenatech (strain)
|
Nikon SMZ 1500
|
Leica S8 APO
|
Leitz Medilux
|
Zeiss Axiotron 2
|
Zeiss Jenatech (particles measurements)
|
Noco IR microscope
|
Nikon SMZ 1000
|
Nikon ME 600
|
Nikon Eclipse L200
|
Nikon Eclipse L200 (2)
|
Nikon ECLIPSE L200N 3
|
Nikon ECLIPSE L200N 4
|
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| Location
|
Check LabManager
|
Check LabManager
|
Check LabManager
|
Check LabManager
|
Check LabManager
|
Check LabManager
|
Check LabManager
|
Check LabManager
|
Check LabManager
|
Check LabManager
|
Check LabManager
|
Check LabManager
|
Check LabManager
|
| Special features
|
Wollastron prism
|
Stereoscopic microscope
|
Stereoscopic microscope
|
No
|
No
|
No
|
Infra red (IR) camera
|
Stereoscopic microscope
|
Wollastron prism
|
Motorized stage
auto scan guide
|
No
|
No
|
No
|
| Ocular magnification
|
10x
|
No
|
No
|
10x
|
10x
|
10x
|
10x
|
No
|
10x
|
10x
|
10x
|
10x
|
10x
|
| Objective magnification
|
2.5x, 5x, 10x, 20x, 50x
|
Zoom 100x
|
Zoom 80x
|
2.5x, 5x, 10x, 20x, 50x
|
5x, 10x, 20x, 50x
|
5x, 10x, 20x, 50x, 100x
|
2.5x, 5x, 20x, 50x
|
Zoom 100x
|
5x, 10x, 20x, 50x, 100x
|
2.5x, 5x, 10x, 20x, 50x, 100x
|
2.5x, 5x, 10x, 20x, 50x, 100x
|
2.5x, 5x, 10x, 20x, 50x, 100x
|
2.5x, 5x, 10x, 20x, 50x, 100x
|
| Bright field
|
Yes
|
No
|
No
|
Yes
|
Yes
|
Yes
|
Yes
|
No
|
Yes
|
Yes
|
Yes
|
Yes
|
Yes
|
| Dark field
|
Yes
|
No
|
No
|
No
|
Yes
|
Yes
|
No
|
No
|
Yes
|
Yes
|
Yes
|
Yes
|
Yes
|
| Polarizer
|
Yes
|
No
|
No
|
No
|
No
|
Yes
|
No
|
No
|
Yes
|
No
|
No
|
No
|
No
|
| Episcopic light (reflected light)
|
Yes
|
Yes
|
Yes
|
Yes
|
Yes
|
Yes
|
Yes
|
Yes
|
Yes
|
Yes
|
Yes
|
Yes
|
Yes
|
| Diascopic light (transmitted light)
|
No
|
Yes
|
No
|
Yes
|
Yes
|
No
|
Yes
|
No
|
No
|
Yes
|
Yes
|
Yes
|
Yes
|
| View with eye
|
Yes
|
Yes
|
Yes
|
Yes
|
Yes
|
Yes
|
Yes
|
Yes
|
Yes
|
Yes
|
Yes
|
Yes
|
Yes
|
| View on screen (camera)
|
Yes
|
No
|
No
|
Yes
|
Yes
|
No
|
Yes (IR)
|
No
|
Yes
|
Yes
|
Yes
|
Yes
|
Yes
|
| Measurement option
|
No
|
No
|
No
|
No
|
Yes
|
No
|
No
|
No
|
No
|
Yes
|
Yes
|
Yes
|
Yes
|
It is possible to make an automated scanning of a full wafer on the Nikon Eclipse L200 with motorized stage Nikon Eclipse L200 auto scan guide
THIS PAGE IS UNDER CONSTRUCTION
| Microscope
|
Location
|
Responsible Group
|
Objectives
|
Ocular
|
Special features
|
Features
|
Camera
|
Analysis software
|
Nikon SMZ 1000
|
346-901
|
Wet chemistry
|
Zoom 0.8x - 8x
|
10x
|
Stereoscopic microscope
|
Episcopic
|
No
|
No
|
Noco IR
|
346-901
|
Wet chemistry
|
|
10x
|
IR imaging
|
- Polarizer
- Episcopic
- Diascopic
- Brightfield
|
IR camera
|
No
|
Leica INM100
|
346-901
|
Wet chemistry
|
|
10x
|
|
- Episcopic
- Diascopic
- Brightfield
- Darkfield
|
DS-Fi2
|
NIS-D
|
Nikon Eclipse L200 #2
|
C1
|
Thin Film
|
|
10x
|
|
- Episcopic
- Diascopic
- Brightfield
- Darkfield
|
DS-Fi1
|
NIS-D
|
Zeiss Jenatech
|
C1
|
Thin Film
|
|
10x
|
|
- Polarizer
- Episcopic
- Diascopic
- Brightfield
|
No
|
No
|
Nikon Eclipse L200 #1
|
D3
|
Thin Film
|
|
10x
|
|
- Episcopic
- Diascopic
- Brightfield
- Darkfield
|
DS-Fi1
|
NIS-BR
|
Leitz Medilux
|
D3
|
Thin Film
|
|
10x
|
|
- Episcopic
- Diascopic
- Brightfield
|
DX40-274FW
|
Kappa Control Center
|
Nikon Eclipse L200N #3
|
E4
|
Lithography
|
|
10x
|
|
- Polarizer
- Episcopic
- Diascopic
- Brightfield
- Darkfield
|
- DS-Fi2
- C-mount, 0.7x relay
|
NIS-D
|
Nikon Eclipse L200N #4
|
E5
|
Lithography
|
|
10x
|
|
- Polarizer
- Episcopic
- Diascopic
- Brightfield
- Darkfield
|
- DS-Fi2
- C-mount, 0.7x relay
|
NIS-D
|
Nikon ME 600
|
F1
|
Thin Film
|
|
10x
|
|
- Polarizer
- Episcopic
- Brightfield
- Darkfield
|
DS-Fi2
|
NIS-D
|
Leica S8 APO
|
F2
|
Thin Film
|
Zoom 1x - 8x
|
10x
|
Stereoscopic microscope
|
Episcopic
|
No
|
No
|
Zeiss Axiotron
|
F3
|
Lithography
|
|
10x
|
|
- Episcopic
- Diascopic
- Brightfield
- Darkfield
|
Infinity X
|
DeltaPix
|
THIS PAGE IS UNDER CONSTRUCTION
| Nikon SMZ 1000
|
Noco IR
|
Leica INM 100
|
Nikon Eclipse L200 #2
|
Zeiss Jenatech
|
Nikon Eclipse L200 #1
|
Leitz Medilux
|
Nikon Eclipse L200N #3
|
Nikon Eclipse L200N #4
|
Nikon ME 600
|
Leica S8 APO
|
Zeiss Axiotron
|
|

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