Specific Process Knowledge/Thin film deposition/ALD Picosun R200/ALD multilayers: Difference between revisions

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	This page describes non standart recipes including multilayers structures.		This page describes non-standart recipes including multilayers structures. They were the first test recipes on the ALD-1 to test the tool functionality and can be used as inspiration.

	==Low temperature deposition of Al<sub>2</sub>O<sub>3</sub>==		==Low temperature deposition of Al<sub>2</sub>O<sub>3</sub>==