Specific Process Knowledge/Back-end processing

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Back-end (or Post-fab) Processing are typical processes used to finish up your wafer/chip. This includes thinning and cutting out the wafer in chips that can be put on a carrier, a board or in a package, attaching the chip to the carrier and connecting it with wires to get electrical access to it.

These processes are usually carried out a number of different places. We also have a laboratory called PackLab located in building 347 1st floor. It is a class 1000 cleanroom and in here we have equipment commonly used for back-end processing. Some equipment is further placed in the basement of building 346 and some on the 1st floor in building 346.

Below you can see a list of equipment for back-end processing that is available at DTU Nanolab.

Choose an equipment

• Stylus profilometer measurements
  • Stylus Profiler:Dektak150
• Substrate/chip/die cleaning
  • Packlab Plasma Asher Pico 2
• Chip/die mounting
  • Die Bonder (eutectic metal)
  • Flip-chip Bonder (glue)
• Wire bonding
  • TPT Wire Bonder
  • Ball Wire Bonder
• Wafer dicing/machining
  • Polisher CMP - located in the cleanroom
  • Polisher/Lapper machine
  • LatticeAxe
  • FlipScribe
  • FlexScribe
  • Wafer Scriber
  • Disco Saw
  • Laser Micromachining Tool
• Molding
  • Polymer Injection Molder
  • Hot Embosser
• X-ray inspection system
  • X-ray Focal Spot inspection system

Choose processing method

Lapping/polishing	Cutting	Milling	Die bonding	Wire bonding
Polisher/Lapper machine	Wafer Scriber LatticeAxe FlipScribe FlexScribe Disco Saw Laser Micromachining Tool	Laser Micromachining Tool Nanotech milling lab	Die Bonder (eutectic metal) Flip-chip Bonder (glue)	TPT Wire Bonder Ball Wire Bonder