Specific Process Knowledge/Back-end processing/LatticeAxe: Difference between revisions
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The LatticeAxe can cleave samples from 100mm down to 10mm. In some cases it can even be used on 150mm samples please contact wetchemistry group for more information | |||
Revision as of 14:05, 31 March 2020
The Cleaver: Lattice Axe is designed for cleaving wafers into smaller pieces. The equipment is placed in the left drawer underneath fumehood 5: Special purposes. When operated the the Cleaver: lattice axe should always be placed inside Fume hood 5.
Approved Materials:
- Si
- Quartz
- Pyrex (Borofloat 33)
- GaAs
- InP
- Sapphire
The LatticeAxe can cleave samples from 100mm down to 10mm. In some cases it can even be used on 150mm samples please contact wetchemistry group for more information