Specific Process Knowledge/Back-end processing/LatticeAxe: Difference between revisions
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'''Approved Materials''': | '''Approved Materials''': | ||
Si | |||
Quartz | *Si | ||
Pyrex (Borofloat 33) | *Quartz | ||
GaAs | *Pyrex (Borofloat 33) | ||
InP | *GaAs | ||
Sapphire | *InP | ||
*Sapphire | |||