Specific Process Knowledge/Back-end processing/LatticeAxe: Difference between revisions
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The Cleaver: Lattice Axe is designed for cleaving wafers into smaller pieces. The equipment is placed in the left drawer underneath fumehood 5: Special purposes. When operated the the Cleaver: lattice axe should always be placed inside Fume hood 5. | The Cleaver: Lattice Axe is designed for cleaving wafers into smaller pieces. The equipment is placed in the left drawer underneath fumehood 5: Special purposes. When operated the the Cleaver: lattice axe should always be placed inside Fume hood 5. | ||
Approved Materials: | |||
Si | |||
Quartz | |||
Pyrex (Borofloat 33) | |||
GaAs | |||
InP | |||
Sapphire | |||