Specific Process Knowledge/Back-end processing/LatticeAxe: Difference between revisions

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The Cleaver: Lattice Axe is designed for cleaving wafers into smaller pieces. The equipment is placed in the left drawer underneath fumehood 5: Special purposes. When operated the the Cleaver: lattice axe should always be placed inside Fume hood 5.
The Cleaver: Lattice Axe is designed for cleaving wafers into smaller pieces. The equipment is placed in the left drawer underneath fumehood 5: Special purposes. When operated the the Cleaver: lattice axe should always be placed inside Fume hood 5.
Approved Materials:
    Si
    Quartz
    Pyrex (Borofloat 33)
    GaAs
    InP
    Sapphire

Revision as of 13:54, 31 March 2020

The Cleaver: Lattice Axe is designed for cleaving wafers into smaller pieces. The equipment is placed in the left drawer underneath fumehood 5: Special purposes. When operated the the Cleaver: lattice axe should always be placed inside Fume hood 5.

Approved Materials:

   Si
   Quartz
   Pyrex (Borofloat 33)
   GaAs
   InP
   Sapphire