Specific Process Knowledge/Etch/DRIE-Pegasus/System-description: Difference between revisions
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* the RF powers | * the RF powers | ||
are changed every few seconds - hence requiring the capacitors to adjust to an entirely new situation. In other words, if not carefully tuned, the Bosch process will spend most of the time stabilizing the plasma. | are changed every few seconds - hence requiring the capacitors to adjust to an entirely new situation. In other words, if not carefully tuned, the Bosch process will spend most of the time stabilizing the plasma. | ||
== The Picoscope == | |||
The process monitoring on the Pegasus has been dramatically improved with the installation of the Picoscope. Click [[Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope|'''HERE''']] to access a page on the Picoscope only. | |||