Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4: Difference between revisions
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'''[[Specific Process Knowledge/Etch/DRIE-Pegasus 4/StandardRecipes|Standard recipes]]''' | '''[[Specific Process Knowledge/Etch/DRIE-Pegasus 4/StandardRecipes|Standard recipes]]''' | ||
*[[Specific Process Knowledge/Etch/DRIE-Pegasus 4/ | *[[Specific Process Knowledge/Etch/DRIE-Pegasus 4/Barc etch |Barc etch]] | ||
'''Hardware changes''' | '''Hardware changes''' | ||
A few hardware modifications have been made on the Pegasus since it was installed in 2019. The changes are listed below. | A few hardware modifications have been made on the Pegasus 3/4 since it was installed in 2019. The changes are listed below. | ||
*[[Specific Process Knowledge/Etch/DRIE-Pegasus 4/showerheadchange|Change of showerhead in 2019]] | *[[Specific Process Knowledge/Etch/DRIE-Pegasus 4/showerheadchange|Change of showerhead in 2019]] | ||