Specific Process Knowledge/Thin film deposition/Lesker: Difference between revisions
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|style="background:LightGrey; color:black"|Deposition rates | |style="background:LightGrey; color:black"|Deposition rates | ||
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*See [[#Relative Sputter rates |table]] | *See [[#Relative Sputter rates |table]] above | ||
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!style="background:silver; color:black" align="left" valign="top" rowspan="3"|Process parameter range | !style="background:silver; color:black" align="left" valign="top" rowspan="3"|Process parameter range | ||