Specific Process Knowledge/Thin film deposition/Lesker: Difference between revisions
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The Lesker CMS 18 sputter system can produce films in a wide range of crystalline qualities. The crystalline quality of a film depends strongly on the substrate (lattice matching), but also on the energy the sputtered material can utilize for annealing. | The Lesker CMS 18 sputter system can produce films in a wide range of crystalline qualities. The crystalline quality of a film depends strongly on the substrate (lattice matching), but also on the energy the sputtered material can utilize for annealing. | ||
*[[Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_NiFe|Film quality optimization for NiFe films]]. | |||
==Surface roughness optimization== | ==Surface roughness optimization== | ||