Specific Process Knowledge/Lithography/UVLithography: Difference between revisions
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If you are new to photolithography, you can visit <u>[https://en.wikipedia.org/wiki/Photolithography this]</u> wikipedia webpage about photolithography before you start. | If you are new to photolithography, you can visit <u>[https://en.wikipedia.org/wiki/Photolithography this]</u> wikipedia webpage about photolithography before you start. | ||
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* '''Complete the Lithography TPT course''': [[LabAdviser/Courses/TPT_Lithography|Lithography Tool Package Training]]. | |||
* '''Prepare a process flow''' which describes all steps in your UV lithography process. You can find docx-templates <u>[[Specific_Process_Knowledge/Lithography/UVLithography#Resist_Overview|in this table]]</u>. | * '''Prepare a process flow''' which describes all steps in your UV lithography process. You can find docx-templates <u>[[Specific_Process_Knowledge/Lithography/UVLithography#Resist_Overview|in this table]]</u>. | ||
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* '''Specify whether you wish to strip or lift-off your resist''': <u>[[Specific_Process_Knowledge/Lithography/Strip|strip]]</u> and <u>[[Specific_Process_Knowledge/Lithography/LiftOff|lift-off]]</u>. | * '''Specify whether you wish to strip or lift-off your resist''': <u>[[Specific_Process_Knowledge/Lithography/Strip|strip]]</u> and <u>[[Specific_Process_Knowledge/Lithography/LiftOff|lift-off]]</u>. | ||
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