Specific Process Knowledge/Characterization/SEM Supra 1: Difference between revisions
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*Any standard cleanroom material and samples from the Laser Micromachining tool and the Polymer Injection Molding tool | *Any standard cleanroom material and samples from the Laser Micromachining tool and the Polymer Injection Molding tool | ||
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===Quality control of length measurement accuracy [[Image:section under construction.jpg|70px]]=== | |||
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|bgcolor="#98FB98" |'''Quality Control (QC) for DektakXTA''' | |||
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*[http://labmanager.dtu.dk/d4Show.php?id=2493&mach=304 QC procedure for SEM Supra 1]<br> | |||
*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=275 Newest QC data for SEM Supra 1]<br> | |||
{| {{table}} | |||
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{| border="2" cellspacing="1" cellpadding="2" align="center" style="width:300px" | |||
! Detector | |||
! Measurement settings | |||
! Magnification | |||
! Measured dimensions | |||
! Calibration limit | |||
! Action limit | |||
|- | |||
|SE2 | |||
| EHT 10 kV, WD 10 mm | |||
| 2.500 k | |||
| 70x70 microns | |||
| ± 2 % | |||
| ± 3 % | |||
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|SE2 | |||
| EHT 10 kV, WD 10 mm | |||
| 17.000 k | |||
| 10x10 microns | |||
| ± 2 % | |||
| ± 3 % | |||
|- | |||
|SE2 | |||
| EHT 5 kV, WD 5 mm | |||
| 17.000 k | |||
| 10x10 microns | |||
| ± 2 % | |||
| ± 3 % | |||
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