Specific Process Knowledge/Characterization/XRD/XRD SmartLab: Difference between revisions
Appearance
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!colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment | !colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment | ||
|style="background:WhiteSmoke; color:black"|<b>XRD SmartLab</b> | |style="background:WhiteSmoke; color:black"|<b>XRD SmartLab</b> | ||
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!style="background:silver; color:black;" align="center" width="60"|Purpose | !style="background:silver; color:black;" align="center" width="60"|Purpose | ||
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*Roughness | *Roughness | ||
*Density | *Density | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan="6"|X-ray generator | !style="background:silver; color:black" align="center" valign="center" rowspan="6"|X-ray generator | ||
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3 kW | 3 kW | ||
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20 to 45 kV | 20 to 45 kV | ||
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2 to 60 mA | 2 to 60 mA | ||
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Type | Type | ||
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Sealed tube | Sealed tube | ||
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Target | Target | ||
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Cu | Cu | ||
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0.4 mm x 8 mm (Line/Point) | 0.4 mm x 8 mm (Line/Point) | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan="5"|Goniometer | !style="background:silver; color:black" align="center" valign="center" rowspan="5"|Goniometer | ||
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incident / receiver coupled or independent | incident / receiver coupled or independent | ||
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300 mm | 300 mm | ||
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0.0001° (0.36") | 0.0001° (0.36") | ||
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*X,Y:±50 mm for a 100 mm wafer | *X,Y:±50 mm for a 100 mm wafer | ||
*Rx,Ry:-5~+5° | *Rx,Ry:-5~+5° | ||
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Diameter: 150 mm | Diameter: 150 mm | ||
Thickness: 0~21 mm | Thickness: 0~21 mm | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Optics | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Optics | ||
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*Soller slit | *Soller slit | ||
*Variable divergence slit | *Variable divergence slit | ||
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|style="background:LightGrey; color:black"|Receiver side | |style="background:LightGrey; color:black"|Receiver side | ||
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*Parallel slit analysers (PSA) | *Parallel slit analysers (PSA) | ||
*Ge(220)x2 analyser | *Ge(220)x2 analyser | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | ||
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up to 150 mm wafers | up to 150 mm wafers | ||
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| style="background:LightGrey; color:black"|Allowed materials | | style="background:LightGrey; color:black"|Allowed materials | ||
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All materials | All materials | ||
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