Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions
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|%PlatenDepLoad=38 |%PlatenDepTune=53 |%PlatenEtchLoad=38 |%PlatenEtchTune=53 | |%PlatenDepLoad=38 |%PlatenDepTune=53 |%PlatenEtchLoad=38 |%PlatenEtchTune=53 | ||
|%CLaritasLoad=L2 |%ClaritasTune=T4 |Temperature=-19 | |%CLaritasLoad=L2 |%ClaritasTune=T4 |Temperature=-19 | ||
|Link2RecipeRun=[[ | |Link2RecipeRun=[[Specific Process Knowledge/Etch/DRIE/Pegasus/DREM/DREM 3kW 100% | '''1''']] | ||
}} | }} | ||
{{Template:Peg1RecipeTableVerBAddrowColors | {{Template:Peg1RecipeTableVerBAddrowColors | ||
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|%PlatenDepLoad=38 |%PlatenDepTune=53 |%PlatenEtchLoad=38 |%PlatenEtchTune=53 | |%PlatenDepLoad=38 |%PlatenDepTune=53 |%PlatenEtchLoad=38 |%PlatenEtchTune=53 | ||
|%CLaritasLoad=L2 |%ClaritasTune=T4 |Temperature=-19 | |%CLaritasLoad=L2 |%ClaritasTune=T4 |Temperature=-19 | ||
|Link2RecipeRun=[[ | |Link2RecipeRun=[[Specific Process Knowledge/Etch/DRIE/Pegasus/DREM/DREM 3kW 100% a| '''1''']] | ||
}} | }} | ||
{{Template:Peg1RecipeTableVerBAddrowColors | {{Template:Peg1RecipeTableVerBAddrowColors | ||
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|%PlatenDepLoad=38 |%PlatenDepTune=53 |%PlatenEtchLoad=38 |%PlatenEtchTune=53 | |%PlatenDepLoad=38 |%PlatenDepTune=53 |%PlatenEtchLoad=38 |%PlatenEtchTune=53 | ||
|%CLaritasLoad=L2 |%ClaritasTune=T4 |Temperature=-19 | |%CLaritasLoad=L2 |%ClaritasTune=T4 |Temperature=-19 | ||
|Link2RecipeRun=[[ | |Link2RecipeRun=[[Specific Process Knowledge/Etch/DRIE/Pegasus/DREM/DREM 3kW 100% b| '''2''']] | ||
}} | }} | ||
|} | |} | ||