Specific Process Knowledge/Lithography/Baking: Difference between revisions
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https://labmanager.dtu.dk/view_binary.php?type=data&mach=336 | |||
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Spincoater: Gamma UV:<br /> https://labmanager.dtu.dk/view_binary.php?type=data&mach= | Spincoater: Gamma ebeam & UV:<br /> http://labmanager.dtu.dk/view_binary.php?fileId=4431 | ||
Spincoater: Gamma UV:<br /> https://labmanager.dtu.dk/view_binary.php?type=data&mach=359 | |||
Developer: TMAH UV-lithography:<br /> https://labmanager.dtu.dk/view_binary.php?type=data&mach=417 | Developer: TMAH UV-lithography:<br /> https://labmanager.dtu.dk/view_binary.php?type=data&mach=417 | ||