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| '''**''' ''Percent variation calculated as (Max-Min)/Average. For thermally evaporated Al, the max was on one side of the wafer rather than in the middle. Measured by Rebecca Ettlinger, Nov. 2018.'' | | '''**''' ''Percent variation calculated as (Max-Min)/Average. For thermally evaporated Al, the max was on one side of the wafer rather than in the middle. Measured by Rebecca Ettlinger, Nov. 2018.'' |
|
| |
| == Quality control (QC) for Wordentec==
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| {| border="1" cellspacing="2" cellpadding="2" colspan="3"
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| |bgcolor="#98FB98" |'''Quality control (QC) for Wordentec'''
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| |-
| |
| |
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| *[http://labmanager.dtu.dk/d4Show.php?id=3736&mach=167 QC procedure for Wordentec]<br>
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| *[https://labmanager.dtu.dk/view_binary.php?type=data&mach=167 The newest QC data for Wordentec]<br>
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|
| |
| {| {{table}}
| |
| | align="center" |
| |
| {| border="1" cellspacing="1" cellpadding="2" align="center" style="width:300px"
| |
|
| |
| ! QC Recipe:
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| ! Ti / Au
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| ! Ni
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| |-
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| |Deposition rate
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| |10 Å/s
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| |10 Å/s
| |
| |-
| |
| |Thickness
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| |100 Å / 900 Å
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| |1000 Å
| |
| |-
| |
| |Pressure
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| |Below 2*10<sup>-6</sup> mbar
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| |Below 2*10<sup>-6</sup> mbar
| |
| |-
| |
| |}
| |
| | align="center" valign="top"|
| |
| {| border="2" cellspacing="1" cellpadding="2" align="center" style="width:440px"
| |
| !QC limits
| |
| !Wordentec
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| |-
| |
| |Measured average thickness (Å)
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| |900-1100 Å
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| |-
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| |Lowest accepted deposition rate (Å/s)
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| |6 Å/s
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| |-
| |
| |}
| |
| |-
| |
| |}
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| Thicknesses are measured in 5 points with one of the Dektak instruments.
| |
| |}
| |
