Specific Process Knowledge/Thin film deposition/Temescal: Difference between revisions
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Thicknesses are measured in 5 points with one of the Dektak instruments. | Thicknesses are measured in 5 points with one of the Dektak instruments. <br> | ||
Additionally we examine the newly deposited films for particles using the particle scanner (if available, otherwise we use the Jenatech microscope in darkfield mode) and we monitor the sheet resistance of the Ti/Au and Al films. | Additionally we examine the newly deposited films for particles using the particle scanner (if available, otherwise we use the Jenatech microscope in darkfield mode) and we monitor the sheet resistance of the Ti/Au and Al films. | ||
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