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==Sputtering of Aluminium==
==Sputtering of Aluminium==


Aluminium may be sputter deposited in either Wordentec or the Lesker sputter system.
Aluminium may be sputter deposited in either Wordentec or the Lesker sputter systems.


*[[/Sputter rates for Al|Sputtering of Aluminium in Wordentec]]
*[[/Sputter rates for Al|Sputtering of Aluminium in Wordentec]]
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